Probe Station (MI-WPT6)

Product Description

Feature's:

The Probe System is able to support the following on-wafer measurement setup:
. I-V/C-V (DC to 10MHz) and pulsed I-V.
. DC/RF Probe card measurement setup.
. The chuck is RF compatible.
. Measurements of current at pA levels with shielding box (shielding box is not a part of the probe station).
. Measurement of the capacitance of the order of fF level.
. Possibility of future upgradable to RF measurements up to 10 GHz.

 Probe System Integration:

. The system is able to integrate with any instrument brand and type for all device measurement test setups.
. The system is able to integrate with the existing Keithley 4200A semiconductor Characterization system
(Semiconductor Characterization System is not a part of the probe station).

Mechanical Performance Specification of Prober.
. Chuck Stage Movement: Manual
. Chuck X-Y Stage: Independent X and Y Axis control
. X-Y stage travel range: 100mm (X axis); 100mm (Y axis)
. Chuck Z Stage measurement sub-systems: Optimized Z Stage movement to keep the device under test (DUT) in focus during probing.